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    Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films

    Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films by Jörg Haeberle, Karsten Henkel, Hassan Gargouri, Franziska Naumann, Bernd Gruska, Michael Arens, Massimo Tallarida, Dieter Schmeißer

    Published 2013-11-01
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