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    Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR

    Biaxial Piezoelectric MEMS Mirrors with Low Absorption Coating for 1550 nm Long-Range LIDAR by L. Mollard, J. Riu, S. Royo, C. Dieppedale, A. Hamelin, A. Koumela, T. Verdot, L. Frey, G. Le Rhun, G. Castellan, C. Licitra

    Published 2023-05-01
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