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Lead-Free LiNbO<sub>3</sub> Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester by Gabriel Barrientos, Giacomo Clementi, Carlo Trigona, Merieme Ouhabaz, Ludovic Gauthier-Manuel, Djaffar Belharet, Samuel Margueron, Ausrine Bartasyte, Graziella Malandrino, Salvatore Baglio
Published 2022-01-01
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