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Activation of telecom emitters in silicon upon ion implantation and ns pulsed laser annealing by Greta Andrini, Gabriele Zanelli, Sviatoslav Ditalia Tchernij, Emilio Corte, Elena Nieto Hernández, Alessio Verna, Matteo Cocuzza, Ettore Bernardi, Salvatore Virzì, Paolo Traina, Ivo P. Degiovanni, Marco Genovese, Paolo Olivero, Jacopo Forneris
Published 2024-04-01
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