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Improved retention of phosphorus donors in germanium using a non-amorphizing fluorine co-implantation technique by Monmeyran, Corentin, Crowe, Iain F, Gwilliam, Russell M, Heidelberger, Christopher, Napolitani, Enrico, Pastor, David, Gandhi, Hemi H, Mazur, Eric, Michel, Jürgen, Agarwal, Anuradha M, Kimerling, Lionel C
Published 2021
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High level active n + doping of strained germanium through co-implantation and nanosecond pulsed laser melting by Pastor, David, Gandhi, Hemi H, Monmeyran, Corentin P, Akey, Austin J, Milazzo, Ruggero, Cai, Yan, Napolitani, Enrico, Gwilliam, Russell M, Crowe, Iain F, Michel, Jurgen, Kimerling, LC, Agarwal, Anuradha, Mazur, Eric, Aziz, Michael J
Published 2021
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