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    Kinetics of stop-flow atomic layer deposition for high aspect ratio template filling through photonic band gap measurements

    Kinetics of stop-flow atomic layer deposition for high aspect ratio template filling through photonic band gap measurements by Karuturi, Siva Krishna, Liu, Lijun, Su, Liap Tat, Zhao, Yang, Fan, Hong Jin, Ge, Xiaochen, He, Sailing, Tok, Alfred Iing Yoong

    Published 2011
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    Journal Article

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