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Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si by Maria Censabella, Cristina Drago, Brunella Cafra, Paolo Badalà, Anna Bassi, Giovanni Piccitto, Salvatore Mirabella, Maria Grazia Grimaldi, Francesco Ruffino
Published 2021-07-01
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