Solid-state qubits integrated with superconducting through-silicon vias by Yost, DRW, Schwartz, ME, Mallek, J, Rosenberg, D, Stull, C, Yoder, JL, Calusine, G, Cook, M, Das, R, Day, AL, Golden, EB, Kim, DK, Melville, A, Niedzielski, BM, Woods, W, Kerman, AJ, Oliver, WD

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