Solid-state qubits integrated with superconducting through-silicon vias Autor Yost, DRW, Schwartz, ME, Mallek, J, Rosenberg, D, Stull, C, Yoder, JL, Calusine, G, Cook, M, Das, R, Day, AL, Golden, EB, Kim, DK, Melville, A, Niedzielski, BM, Woods, W, Kerman, AJ, Oliver, WD

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