Solid-state qubits integrated with superconducting through-silicon vias nork Yost, DRW, Schwartz, ME, Mallek, J, Rosenberg, D, Stull, C, Yoder, JL, Calusine, G, Cook, M, Das, R, Day, AL, Golden, EB, Kim, DK, Melville, A, Niedzielski, BM, Woods, W, Kerman, AJ, Oliver, WD

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