Solid-state qubits integrated with superconducting through-silicon vias door Yost, DRW, Schwartz, ME, Mallek, J, Rosenberg, D, Stull, C, Yoder, JL, Calusine, G, Cook, M, Das, R, Day, AL, Golden, EB, Kim, DK, Melville, A, Niedzielski, BM, Woods, W, Kerman, AJ, Oliver, WD

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