An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher by Gower, Aaron E. (Aaron Elwood)

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Integrated model-based run-to-run uniformity control for epitaxial silicon deposition. by Gower, Aaron E. (Aaron Elwood)

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Computer-Assisted Prototyping of Advanced Microsystems by Troxel, Donald E., McIlrath, Michael B., Chery, Yonald, Thompson, Carl V., Lee, Zachary K., Antoniadis, Dimitri A., Boning, Duane S., Lohman, Thomas L., Gower, Aaron E., Perez, Manuel J., Lee, Brian, Verminski, Matthew D., Moyne, William P., Chandrakasan, Anantha P., Saha, Debashis

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Computer-Integrated Design and Manufacture of Integrated Circuits by Troxel, Donald E., McIlrath, Michael B., Chery, Yonald, Thompson, Carl V., Boning, Duane S., Lohman, Thomas J., Gower, Aaron E., Kao, James T., Lee, Brian, Kittipiyakul, Somsak, Perez, Manuel J., Moyne, William P., Wright, Chantal E., Peters, Christopher, Verminski, Matthew D., Chung, James E., Nemec, Joseph E., Gershwin, Stanley B.

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