Showing 1 - 2 results of 2 for search 'Gower, Aaron E. (Aaron Elwood)', query time: 0.04s Refine Results
  1. 1
    An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher

    An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher by Gower, Aaron E. (Aaron Elwood)

    Published 2005
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    Thesis
  2. 2
    Integrated model-based run-to-run uniformity control for epitaxial silicon deposition.

    Integrated model-based run-to-run uniformity control for epitaxial silicon deposition. by Gower, Aaron E. (Aaron Elwood)

    Published 2005
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    Get full text
    Thesis

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