Size-Effect-Based Dimension Compensations in Wet Etching for Micromachined Quartz Crystal Microstructures gan Yide Dong, Guangbin Dou, Zibiao Wei, Shanshan Ji, Huihui Dai, Kaiqin Tang, Litao Sun

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Etching of quartz crystals in liquid phase environment: A review gan Yide Dong, Yike Zhou, Haizhou Huang, Bosong Zhang, Xihan Li, Kaiwen Chen, Litao Sun, Guangbin Dou

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