Evaluation of the Piezoresistivity of a Thin Film of ZnO Doped with Fluorine and Deposited via the Ultrasonic Spray Pyrolysis Technique for Applications in Micro/Nano-Electromechan... by Héctor Eduardo Petlacalco Ramírez, Salvador Alcántara Iniesta, Blanca Susana Soto Cruz, Jesús Israel Mejía Silva

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