Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conferenc... by International Symposium on Silicon Science (5th : 2009 : Kiryu-shi, Japan) 521679, Hanaizumi, Osamu 521682, Unno, Masafumi 521683, Gunma Daigaku. International Education and Research Center for Silicon Science 521684, Gunma Daigaku. Advanced Technology Research Center 521685, International Conference on Advanced Micro-Device Engineering (1st : 2009 : Kiryu-shi, Japan) 521686