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    SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use

    SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use by Thomas Winterstein, Matthias Staab, Christian Nakic, Hans-Jürgen Feige, Jürgen Vogel, Helmut F. Schlaak

    Published 2014-12-01
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