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    3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI

    3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI by Liu, Wenjuan, He, Leming, Wang, Xubo, Zhou, Jia, Xu, Weijiang, Smagin, Nikolay, Toubal, Malika, Yu, Hao, Gu, Yuandong, Xu, Jinghui, Remiens, Denis, Ren, Junyan

    Published 2020
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    Journal Article

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