Showing 1 - 2 results of 2 for search 'Heinrich Behle', query time: 0.02s Refine Results
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    Customized piezoresistive microprobes for combined imaging of topography and mechanical properties

    Customized piezoresistive microprobes for combined imaging of topography and mechanical properties by Michael Fahrbach, Sebastian Friedrich, Heinrich Behle, Min Xu, Brunero Cappella, Uwe Brand, Erwin Peiner

    Published 2021-06-01
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  2. 2
    Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

    Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm by Uwe Brand, Min Xu, Lutz Doering, Jannick Langfahl-Klabes, Heinrich Behle, Sebastian Bütefisch, Thomas Ahbe, Erwin Peiner, Stefan Völlmeke, Thomas Frank, Bodo Mickan, Ilia Kiselev, Michael Hauptmannl, Michael Drexel

    Published 2019-03-01
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