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  1. 1

    Interferometric lithography and selected applications by Farhoud, Maya S. (Maya Sami)

    Published 2005
    Other Authors: “…Henry I. Smith.…”
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    Thesis
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    An aligner for X-ray nanolithography by Moel Modiano, Alberto

    Published 2005
    Other Authors: “…Henry I. Smith.…”
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    Thesis
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    Refining the process of achromatic holographic lithography by Olster, Daniel B

    Published 2005
    Other Authors: “…Henry I. Smith.…”
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    Thesis
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    Method of photolithographic projection system characterization by Ahlers, Eve D

    Published 2005
    Other Authors: “…Henry I. Smith.…”
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    Diffractive optics for maskless lithography and imaging by Menon, Rajesh, 1976-

    Published 2005
    Other Authors: “…Henry I. Smith.…”
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    Thesis
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