Effects of point defect healing on phosphorus implanted germanium n+/p junction and its thermal stability by Lee, In-Yeal, Shin, Jeong-hun, Choi, Daebeom, Baek, Jung Woo, Heo, Jonggon, Park, Wonkyu, Leem, Jung Woo, Yu, Jae Su, Jung, Woo-Shik, Saraswat, Krishna, Park, Jin-Hong, Shim, Jaewoo

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