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    Resonant Varifocal Micromirror with Piezoresistive Focus Sensor

    Resonant Varifocal Micromirror with Piezoresistive Focus Sensor by Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya, Kazuhiro Hane

    Published 2016-03-01
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