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    Sputtering Yields of Si Bombarded with 10–540-keV C<sub>60</sub> Ions

    Sputtering Yields of Si Bombarded with 10–540-keV C<sub>60</sub> Ions by Kazumasa Narumi, Hiroshi Naramoto, Keisuke Yamada, Atsuya Chiba, Yuichi Saitoh

    Published 2022-03-01
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