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    Amorphous In-Ga-Mg-O Thin Films Formed by RF Magnetron Sputtering: Optical, Electrical Properties and Thin-Film-Transistor Characteristics

    Amorphous In-Ga-Mg-O Thin Films Formed by RF Magnetron Sputtering: Optical, Electrical Properties and Thin-Film-Transistor Characteristics by Hisato Yabuta, Naho Itagaki, Toshikazu Ekino, Yuzo Shigesato

    Published 2022-01-01
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