Wire-arc spray directed energy deposition: Correlation of chamber kits refurbishing and particle defects reduction in Ta/TaN thin-film physical deposition processes by Shang-Shian Yang, Hong-Lin Lai, Chih-Chia Chen, Shao-Tse Lu, Yu-Min Dai, Wen-Cheng Cheng, Yiin-Kuen Fuh, Tomi T. Li

Get full text