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Demonstration of 10 nm Ferroelectric Al<sub>0.7</sub>Sc<sub>0.3</sub>N-Based Capacitors for Enabling Selector-Free Memory Array by Li Chen, Chen Liu, Hock Koon Lee, Binni Varghese, Ronald Wing Fai Ip, Minghua Li, Zhan Jiang Quek, Yan Hong, Weijie Wang, Wendong Song, Huamao Lin, Yao Zhu
Published 2024-01-01
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