Showing 1 - 2 results of 2 for search 'Huang, Maggie Y. M.', query time: 0.02s Refine Results
  1. 1
    Fourier transform infrared spectroscopy of low-k dielectric material on patterned wafers

    Fourier transform infrared spectroscopy of low-k dielectric material on patterned wafers by Huang, Maggie Y. M., Lam, Jeffrey Chorkeung, Tan, Hao, Zhang, Fan, Sun, Handong, Shen, Zexiang, Mai, Zhihong

    Published 2013
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    Journal Article
  2. 2
    Evidence of ultra-low-k dielectric material degradation and nanostructure alteration of the Cu/ultra-low-k interconnects in time-dependent dielectric breakdown failure

    Evidence of ultra-low-k dielectric material degradation and nanostructure alteration of the Cu/ultra-low-k interconnects in time-dependent dielectric breakdown failure by Lam, Jeffrey C. K., Huang, Maggie Y. M., Ng, Tsu Hau, Mohammed Khalid Dawood, Zhang, Fan, Du, Anyan, Sun, Handong, Shen, Zexiang, Mai, Zhihong

    Published 2013
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    Journal Article

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