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  1. 1
    Fourier transform infrared spectroscopy of low-k dielectric material on patterned wafers

    Fourier transform infrared spectroscopy of low-k dielectric material on patterned wafers por Huang, Maggie Y. M., Lam, Jeffrey Chorkeung, Tan, Hao, Zhang, Fan, Sun, Handong, Shen, Zexiang, Mai, Zhihong

    Publicado 2013
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    Journal Article
  2. 2
    Evidence of ultra-low-k dielectric material degradation and nanostructure alteration of the Cu/ultra-low-k interconnects in time-dependent dielectric breakdown failure

    Evidence of ultra-low-k dielectric material degradation and nanostructure alteration of the Cu/ultra-low-k interconnects in time-dependent dielectric breakdown failure por Lam, Jeffrey C. K., Huang, Maggie Y. M., Ng, Tsu Hau, Mohammed Khalid Dawood, Zhang, Fan, Du, Anyan, Sun, Handong, Shen, Zexiang, Mai, Zhihong

    Publicado 2013
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    Ligazón do recurso
    Journal Article

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