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Enhancing the Plasma-Resistance Properties of Li<sub>2</sub>O–Al<sub>2</sub>O<sub>3</sub>–SiO<sub>2</sub> Glasses for the Semiconductor Etch Process via Alkaline Earth Oxide Incorp... by So-Won Kim, Hwan-Seok Lee, Deok-Sung Jun, Seong-Eui Lee, Joung-Ho Lee, Hee-Chul Lee
Published 2023-07-01
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