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    Effect of CaF2 on fluorocarbon plasma resistance and thermal properties of CaO-Al2O3-SiO2 glasses

    Effect of CaF2 on fluorocarbon plasma resistance and thermal properties of CaO-Al2O3-SiO2 glasses by Jewon Park, Jae Ho Choi, Hyein Na, Hyeong-Jun Kim

    Published 2021-01-01
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