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    Remarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications

    Remarkable plasma-resistance performance by nanocrystalline Y2O3·MgO composite ceramics for semiconductor industry applications by Hyeon-Myeong Oh, Young-Jo Park, Ha-Neul Kim, Kundan Kumar, Jae-Woong Ko, Chae-Eon Lee, Hyun-Kwuon Lee

    Published 2021-05-01
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    Article

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