TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT by I. V. Dainiak, V. V. Jarski, S. E. Karpovich

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Mechatronic system of parallel kinematics on hybrid direct action drivers by S. E. Karpovich, I. V. Dainiak, V. V. Kuzniatsou

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PRECISION MOTION SYSTEMS FOR EQUIPMENT OF ELECTRONIC TECHNICS MANUFACTURING by S. E. Karpovich, V. V. Jarski, I. V. Dainiak

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ALGORITHMIZATION OF NON-COLLISION MOTIONS OF PLANAR POSITIONERS OF UNIVERSAL ASSEMBLY UNIT by V. V. Poliakovski, D. G. Begun, I. V. Dainiak

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PRECISION MOTION SYSTEM FOR OPTO-MECHANICAL EQUIPMENT OF MICROELECTRONICS by I. V. Dainiak, S. E. Karpovich, N. I. Kekish, L. Goldyn

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GENERATING OF OPTIMAL QUANTIZATION LEVELS OF CONTROL CURRENTS FOR LINEAR STEPPING DRIVES OF PRECISION MOTION SYSTEMS by I. V. Dainiak, V. P. Oger, D. S. Tsitko, D. G. Begun

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Reduction of Discrete Grid Step of Motion Systems Based on Linear Stepping Motor by S.E. Karpovich, V.P. Oger, I.V. Dainiak, A.V. Bezlyudov

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MATHEMATICAL MODEL OF THE FORMING OF HIGH RESOLUTION DISCRETE GRID FOR MOTION SYSTEM BASED ON LINEAR STEPPING DRIVE by I. V. Dainiak, S. E. Karpovich, V. P. Oger, A. V. Bezlyudov, D. S. Titko

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