Influence of Substrate Temperature on Microstructure of Zirconium Silicon Nitride Thin Films Deposited by Reactive Magnetron Sputtering by F.S. Oliveira, I.L. Dias, P.L.L. Araújo, D.A. Ramirez, P.C. Silva Neto, R. Hübler, F.M.T. Mendes, I.Z. Damasceno, E.K. Tentardini

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