Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition por Alexander A. Temirov, Ilya V. Kubasov, Andrei V. Turutin, Tatiana S. Ilina, Alexander M. Kislyuk, Dmitry A. Kiselev, Elena A. Skryleva, Nikolai A. Sobolev, Igor A. Salimon, Nikolai V. Batrameev, Mikhail D. Malinkovich, Yuri N. Parkhomenko

Obter o texto integral