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    Features of Metalorganic Chemical Vapor Deposition Selective Area Epitaxy of Al<sub>z</sub>Ga<sub>1−z</sub>As (0 ≤ <i>z</i> ≤ 0.3) Layers in Arrays of Ultrawide Windows

    Features of Metalorganic Chemical Vapor Deposition Selective Area Epitaxy of Al<sub>z</sub>Ga<sub>1−z</sub>As (0 ≤ <i>z</i> ≤ 0.3) Layers in Arrays of Ultrawide Windows by Viktor Shamakhov, Sergey Slipchenko, Dmitriy Nikolaev, Ilya Soshnikov, Alexander Smirnov, Ilya Eliseyev, Artyom Grishin, Matvei Kondratov, Artem Rizaev, Nikita Pikhtin, Peter Kop’ev

    Published 2023-07-01
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