Showing 1 - 1 results of 1 for search 'Isabelle Servin', 查询时间: 0.02s Refine Results
  1. 1
    Water-soluble bio-sourced resists for DUV lithography in a 200/300 mm pilot line environment

    Water-soluble bio-sourced resists for DUV lithography in a 200/300 mm pilot line environment 由 Isabelle Servin, Alexandre Teolis, Arnaud Bazin, Paule Durin, Olha Sysova, Corinne Gablin, Benoît Saudet, Didier Leonard, Olivier Soppera, Jean-Louis Leclercq, Yann Chevolot, Raluca Tiron, Thierry Delair, Stéphane Trombotto

    出版 2023-06-01
    获取全文
    文件

检索工具: