The Influence of Argon Cluster Ion Bombardment on the Characteristics of AlN Films on Glass-Ceramics and Si Substrates by Ivan V. Nikolaev, Pavel V. Geydt, Nikolay G. Korobeishchikov, Aleksandr V. Kapishnikov, Vladimir A. Volodin, Ivan A. Azarov, Vladimir I. Strunin, Evgeny Y. Gerasimov

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