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Impact of Hydrogen Plasma on Electrical Properties and Deep Trap Spectra in Ga<sub>2</sub>O<sub>3</sub> Polymorphs by Alexander Y. Polyakov, Eugene B. Yakimov, Vladimir I. Nikolaev, Alexei I. Pechnikov, Andrej V. Miakonkikh, Alexander Azarov, In-Hwan Lee, Anton A. Vasilev, Anastasiia I. Kochkova, Ivan V. Shchemerov, Andrej Kuznetsov, Stephen J. Pearton
Published 2023-09-01
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