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Controlling electrical and optical properties of zinc oxide thin films grown by thermal atomic layer deposition with oxygen gas by Tai Nguyen, Noureddine Adjeroud, Mael Guennou, Jérôme Guillot, Yves Fleming, Anne-Marie Papon, Didier Arl, Kevin Menguelti, Raoul Joly, Narciso Gambacorti, Jérôme Polesel-Maris
Published 2020-06-01
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Widely Tuneable Composition and Crystallinity of Graded Na<sub>1+x</sub>TaO<sub>3±δ</sub> Thin Films Fabricated by Chemical Beam Vapor Deposition by Corrado Garlisi, Petru Lunca Popa, Kevin Menguelti, Vincent Rogé, Marc Michel, Christèle Vergne, Jérôme Guillot, Estelle Wagner, William Maudez, Giacomo Benvenuti, Bianca Rita Pistillo, Emanuele Barborini
Published 2022-03-01
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