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    The Role of HiPIMS Pulse Length in Reactive Deposition of Transparent Conductive Oxide Nb:TiO2 Films

    The Role of HiPIMS Pulse Length in Reactive Deposition of Transparent Conductive Oxide Nb:TiO2 Films by J. Stryhalski, A. Laur, J.C. Sagás, A.A Couto, K. Grigorov, L.C. Fontana, M. Massi

    Published 2023-07-01
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