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    Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications

    Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications by Yang Zou, Chao Gao, Jie Zhou, Yan Liu, Qinwen Xu, Yuanhang Qu, WenJuan Liu, Jeffrey Bo Woon Soon, Yao Cai, Chengliang Sun

    Published 2022-11-01
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