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    Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer

    Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer by Tao Li, Le Zhang, Wenping Geng, Jian He, Yongkang Rao, Jiabing Huo, Kunxian Yan, Xiujian Chou

    Published 2023-01-01
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    Article

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