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    Deposition of diamond films by microwave plasma CVD on 4H-SiC substrates

    Deposition of diamond films by microwave plasma CVD on 4H-SiC substrates by Shasha Wei, Renqi Xie, Yuanyou Li, Jiahao Meng, Rongchuan Lin, Jianchun Weng, Bo Li

    Published 2023-01-01
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