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    Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations

    Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations by Zhichao Shi, Emile Martincic, Johan Moulin, Elie Lefeuvre, Frédéric Lamarque

    Published 2022-04-01
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