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Spatially‐Modulated Silicon Interface Energetics Via Hydrogen Plasma‐Assisted Atomic Layer Deposition of Ultrathin Alumina by Alex Henning, Johannes D. Bartl, Lukas Wolz, Maximilian Christis, Felix Rauh, Michele Bissolo, Theresa Grünleitner, Johanna Eichhorn, Patrick Zeller, Matteo Amati, Luca Gregoratti, Jonathan J. Finley, Bernhard Rieger, Martin Stutzmann, Ian D. Sharp
Published 2023-02-01
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