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Influence of Alumina Addition on the Optical Properties and the Thermal Stability of Titania Thin Films and Inverse Opals Produced by Atomic Layer Deposition by Martin Waleczek, Jolien Dendooven, Pavel Dyachenko, Alexander Y. Petrov, Manfred Eich, Robert H. Blick, Christophe Detavernier, Kornelius Nielsch, Kaline P. Furlan, Robert Zierold
Published 2021-04-01
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Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers by Nithin Poonkottil, Hannes Rijckaert, Khannan Rajendran, Robin R. Petit, Lisa I. D. J. Martin, Dries Van Thourhout, Isabel Van Driessche, Christophe Detavernier, Jolien Dendooven
Published 2023-03-01
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