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Low temperature activation of amorphous In-Ga-Zn-O semiconductors using microwave and e-beam radiation, and the associated thin film transistor properties by Seong Cheol Jang, Jozeph Park, Hyoung-Do Kim, Hyunmin Hong, Kwun-Bum Chung, Yong Joo Kim, Hyun-Suk Kim
Published 2019-02-01
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