Monolithic 3D integration of back-end compatible 2D material FET on Si FinFET by Shi-Xian Guan, Tilo H. Yang, Chih-Hao Yang, Chuan-Jie Hong, Bor-Wei Liang, Kristan Bryan Simbulan, Jyun-Hong Chen, Chun-Jung Su, Kai-Shin Li, Yuan-Liang Zhong, Lain-Jong Li, Yann-Wen Lan

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