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    Structural Study of Thin Amorphous SiO2 and Si3N4 Films by the Grazing Incidence X-Ray Scattering (GIXS) Method

    Structural Study of Thin Amorphous SiO2 and Si3N4 Films by the Grazing Incidence X-Ray Scattering (GIXS) Method by Sato, Shigeo, Kakiuchi, Ryoji, Yoshiya, Masato, Matsubara, Eiichiro, Saito, Masatoshi, Waseda, Yoshio, Takayama, Shinji

    Published 1999-01-01
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