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Rational design of SiBCN microstructures using direct photolithography of patternable preceramic photoresists by Quentin Hanniet, Eddy Petit, Sylvie Calas-Etienne, Pascal Etienne, Karim Aissou, Christel Gervais, Philippe Miele, Benoit Charlot, Chrystelle Salameh
Published 2022-11-01
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